A novel long-stroke fast tool servo system with counterbalance and its application to the ultra-precision machining of microstructured surfaces

This paper presents a novel long-stroke fast tool servo (FTS) system with counterbalance and its application to the diamond machining of microstructured surfaces. The FTS is driven by voice coil motor guided air bearings. A hybrid control algorithm which combines PID control, sliding mode feed-forward was specifically designed for ensures that it has less than 1% tracking error achieves ± 1 mm stroke 105 Hz bandwidth. achieved symmetric arrangement two same systems. System vibration decreased significantly from 3 ?m 0.145 when working. Machining experiments were conducted using on turning machine. surface simulation model built information about workpiece tested collected. When working, in machine axes micron-level nano-level roughness also reduced. (±0.5 mm) at 30 (40 Hz) 0.35% (0.68%) during processes, depth machined measured 1.4% (2.3%).